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1

[IEEE 2017 Symposium on VLSI Technology - Kyoto, Japan (2017.6.5-2017.6.8)] 2017 Symposium on VLSI Technology - Impact of total and partial dipole switching on the switching slope of gate-last negative capacitance FETs with ferroelectric hafnium zirconium oxide gate stack

Sharma, P., Tapily, K., Saha, A. K., Zhang, J., Shaughnessy, A., Aziz, A., Snider, G. L., Gupta, S., Clark, R. D., Datta, S.

Year:

2017

Language:

english

File:

PDF, 1.20 MB

english, 2017

2

[IEEE 2019 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2019.12.7-2019.12.11)] 2019 IEEE International Electron Devices Meeting (IEDM) - A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices

Loubet, N., Devarajan, T., Zhang, J., Miao, X., Sankar, M., Breton, M., Chao, R., Greene, A., Yu, L., Frougier, J., Chanemougame, D., Kal, S., Tapily, K., Smith, J., Basker, V., Mosden, A., Biolsi, P.

Year:

2019

File:

PDF, 7.41 MB

2019

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Advanced Etch Technology for Nanopatterning VI - Self-aligned quadruple patterning using spacer on spacer integration optimization for N5

Engelmann, Sebastian U., Wise, Rich S., Thibaut, Sophie, Raley, Angélique, Mohanty, Nihar, Kal, Subhadeep, Liu, Eric, Ko, Akiteru, O'Meara, David, Tapily, Kandabara, Biolsi, Peter

Year:

2017

Language:

english

File:

PDF, 1.85 MB

english, 2017

4

Perspective: New process technologies required for future devices and scaling

Clark, R., Tapily, K., Yu, K.-H., Hakamata, T., Consiglio, S., O’Meara, D., Wajda, C., Smith, J., Leusink, G.

Journal:

Year:

2018

Language:

english

File:

PDF, 4.11 MB

english, 2018

5

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Advanced Etch Technology for Nanopatterning V - Self-aligned quadruple patterning integration using spacer on spacer pitch splitting at the resist level for sub-32nm pitch applications

Lin, Qinghuang, Engelmann, Sebastian U., Raley, Angélique, Thibaut, Sophie, Mohanty, Nihar, Subhadeep, Kal, Nakamura, Satoru, Ko, Akiteru, O'Meara, David, Tapily, Kandabara, Consiglio, Steve, Biolsi,

Year:

2016

Language:

english

File:

PDF, 1.45 MB

english, 2016

6

Impact of Slot Plane Antenna Annealing on Carrier Transport Mechanism and Reliability on ZrO 2 /Al 2 O 3 /Ge Gate Stack

Ding, Y. M., Misra, D., Tapily, K., Clark, R. D., Consiglio, S., Wajda, C. S., Leusink, G. J.

Journal:

IEEE Transactions on Device and Materials Reliability

Year:

2017

Language:

english

File:

PDF, 2.11 MB

english, 2017

7

Precise control of highly ordered arrays of nested semiconductor/metal nanotubes

Diefeng Gu, Helmut Baumgart, Kandabara Tapily, Pragya Shrestha, Gon Namkoong, Xianyu Ao, Frank Müller

Journal:

Year:

2011

Language:

english

File:

PDF, 1.26 MB

english, 2011

8

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Thermal Behavior of the Mechanical Properties of GaN throughout Hydrogen-Induced Thin Layer Transfer

Tapily, Kandabara, Moutanabbir, Oussama, Gu, Diefeng, Baumgart, Helmut, Elmustafa, Abdelmageed

Year:

2010

Language:

english

File:

PDF, 1.14 MB

english, 2010

9

Silicidation of Niobium Deposited on Silicon by Physical Vapor Deposition

Ndoye, Coumba, Tapily, Kandabara, Orlowski, Marius, Baumgart, Helmut, Gu, Diefeng

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 2.72 MB

english, 2011

10

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Raman Spectroscopy of ZnO Thin Films by Atomic Layer Deposition

Tapily, Kandabara, Gu, Diefeng, Baumgart, Helmut, Rigo, Maria, Seo, Jaetae

Year:

2010

Language:

english

File:

PDF, 272 KB

english, 2010

11

Relation entre l’anémie et le paludisme dans deux groupes ethniques vivant en sympatrie au Mali

A. Dolo, B. Maiga, Y. Tolo, A. Tapily, C. Arama, M. Daou, M. Baby, B. Traore, O. Doumbo

Journal:

Bulletin de la Société de pathologie exotique

Year:

2012

File:

PDF, 155 KB

2012

12

Place du paludisme dans les syndromes fébriles dans deux groupes ethniques vivant en sympatrie au Mali de 1998

A. Dolo, B. Maïga, V. Dara, A. Tapily, Y. Tolo, C. Arama, M. Daou, O. Doumbo

Journal:

Bulletin de la Société de pathologie exotique

Year:

2012

File:

PDF, 239 KB

2012

13

Mechanical and structural characterization of atomic layer deposition-based ZnO films

Tapily, K, Gu, D, Baumgart, H, Namkoong, G, Stegall, D, Elmustafa, A A

Journal:

Semiconductor Science and Technology

Year:

2011

Language:

english

File:

PDF, 1.02 MB

english, 2011

14

Multi-technique x-ray and optical characterization of crystalline phase, texture, and electronic structure of atomic layer deposited Hf1−xZrxO2 gate dielectrics deposited by a cyclical deposition and annealing scheme

Vasić, Relja, Consiglio, Steven, Clark, Robert D., Tapily, Kandabara, Sallis, Shawn, Chen, Bo, Newby, David, Medikonda, Manasa, Raja Muthinti, Gangadhara, Bersch, Eric, Jordan-Sweet, Jean, Lavoie, Ch

Journal:

Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 2.10 MB

english, 2013

15

Journée de la Société de pathologie exotique du 28 mai 2014, Institut Pasteur, Paris

Dolo, A., Maiga, B., Guindo, A., Diakité, S. A. S., Diakite, M., Tapily, A., Traoré, M., Sangaré, B., Arama, C., Daou, M., Doumbo, O.

Journal:

Bulletin de la Société de pathologie exotique

Year:

2014

Language:

french

File:

PDF, 130 KB

french, 2014

16

Fréquence du déficit en glucose-6-phosphate déshydrogénase (A-376/202) dans trois groupes ethniques vivant en zone d’endémie palustre au Mali

Dolo, A., Maiga, B., Guindo, A., Diakité, S. A. S., Diakite, M., Tapily, A., Traoré, M., Sangaré, B., Arama, C., Daou, M., Doumbo, O.

Journal:

Bulletin de la Société de pathologie exotique

Year:

2014

File:

PDF, 195 KB

2014

17

(Invited) Passivation Schemes for Ge High-K Metal Gate MOSFETs on Si for VLSI Production

Tapily, K., Ngai, T., Clark, R., O'meara, D., Consiglio, S., Gaylord, R., Wajda, C., Veksler, D., Hobbs, C., Matthews, K., Gilmer, D., Kirsch, P., Leusink, G.

Journal:

ECS Transactions

Year:

2014

Language:

english

File:

PDF, 322 KB

english, 2014

18

[IEEE 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Hsinchu, Taiwan (2014.4.28-2014.4.30)] Proceedings of Technical Program - 2014 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA) - Mechanistic understanding of mobility degradation on gate-last ZrO2 with medium thermal budget annealing

Ngai, T., Clark, R. D., Veksler, D., Matthews, K., Bersch, E., Gilmer, D.C., Bersuker, G., Hill, R., Hobbs, C., Tapily, K., Wajda, C. S., Consiglio, S., Burroughs, T., Vivekanand, S., Kaushik, V., Leu

Year:

2014

Language:

english

File:

PDF, 588 KB

english, 2014

19

Cyclic Plasma Treatment during ALD Hf1-XZrxO2 Deposition

Bhuyian, M., Misra, D., Tapily, K., Clark, R., Consiglio, S., Wajda, C., Nakamura, G., Leusink, G.

Journal:

ECS Transactions

Year:

2014

Language:

english

File:

PDF, 818 KB

english, 2014

20

HfxZr1−xO2 compositional control using co-injection atomic layer deposition

Consiglio, Steven, Tapily, Kandabara, Clark, Robert D., Nakamura, Genji, Wajda, Cory S., Leusink, Gert J.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2013

Language:

english

File:

PDF, 1.41 MB

english, 2013

21

Fc gamma Receptor IIa-H131R Polymorphism and Malaria Susceptibility in Sympatric Ethnic Groups, Fulani and Dogon of Mali

Maiga, B., Dolo, A., Touré, O., Dara, V., Tapily, A., Campino, S., Sepulveda, N., Corran, P., Rockett, K., Clark, T. G., Troye Blomberg, M., Doumbo, O. K.

Journal:

Scandinavian Journal of Immunology

Year:

2014

Language:

english

File:

PDF, 184 KB

english, 2014

22

[IEEE 2014 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2014.6.9-2014.6.12)] 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers - Statistical demonstration of silicide-like uniform and ultra-low specific contact resistivity using a metal/high-k/Si stack in a sidewall contact test structure

Majumdar, K., Clark, R., Ngai, T., Tapily, K., Consiglio, S., Bersch, E., Matthews, K., Stinzianni, E., Trickett, Y., Nakamura, G., Wajda, C., Leusink, G., Chong, H., Kaushik, V., Woicik, J., Hobbs, C

Year:

2014

Language:

english

File:

PDF, 849 KB

english, 2014

23

[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Nanotube/nanorods fabrication of ZnO using atomic layer deposition and the template replication method

Gu, D., Tapily, K., Shrestha, P., Baumgart, H.

Year:

2009

Language:

english

File:

PDF, 352 KB

english, 2009

24

Electrical Enhancement and Higher-K Engineering in Ultra-Thin Atomic Layer Deposited Hf1-xAlxOy Films

Tapily, K., Consiglio, S., Clark, R. D., Vasi , R., Wajda, C. S., Jordan-Sweet, J., Leusink, G. J., Diebold, A. C.

Journal:

ECS Journal of Solid State Science and Technology

Year:

2014

Language:

english

File:

PDF, 709 KB

english, 2014

25

Texturing and Tetragonal Phase Stabilization of ALD HfxZr1-xO2 Using a Cyclical Deposition and Annealing Scheme

Tapily, K., Consiglio, S., Clark, R. D., Vasic, R., Bersch, E., Jordan-Sweet, J., Wells, I., Leusink, G. J., Diebold, A. C.

Journal:

ECS Transactions

Year:

2012

Language:

english

File:

PDF, 571 KB

english, 2012

26

Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO2 and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes

Consiglio, Steven, Tapily, Kandabara, Clark, Robert D., Hasegawa, Toshio, Amano, Fumitaka, Leusink, Gert J., Jordan-Sweet, Jean, Vasić, Relja, Medikonda, Manasa, Diebold, Alain C.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2014

Language:

english

File:

PDF, 3.91 MB

english, 2014

27

Higher-K Formation in Atomic Layer Deposited Hf1-XAlxOy

Tapily, K., Consiglio, S., Clark, R., Vasic, R., Wajda, C., Jordan-Sweet, J., Leusink, G., Diebold, A. C.

Journal:

ECS Transactions

Year:

2014

Language:

english

File:

PDF, 1.63 MB

english, 2014

28

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Structural Characteristics of Electrically Scaled ALD HfO

Consiglio, Steven, Clark, Robert D., Bersch, Eric, LaRose, Joshua, Wells, Ilyssa, Tapily, Kandabara, Leusink, Gert J., Diebold, Alain

Year:

2011

Language:

english

File:

PDF, 1.35 MB

english, 2011

29

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Investigation of Volmer-Weber Growth during the Nucleation Phase of ALD Platinum Thin Films and Template Based Platinum Nanotubes

Shrestha, Pragya, Gu, Diefeng, Tran, Ngoc, Tapily, Kandabara, Baumgart, Helmut, Namkoong, Gon

Year:

2010

Language:

english

File:

PDF, 1.20 MB

english, 2010

30

Crystallinity of Electrically Scaled Atomic Layer Deposited HfO2 from a Cyclical Deposition and Annealing Scheme

Consiglio, S., Clark, R. D., Bersch, E., LaRose, J. D., Wells, I., Tapily, K., Leusink, G. J., Diebold, A. C.

Journal:

Journal of The Electrochemical Society

Year:

2012

Language:

english

File:

PDF, 576 KB

english, 2012

31

Effect of Al Doping on the Reliability of ALD HfO2

Bhuyian, M., Misra, D., Tapily, K., Clark, R., Consiglio, S., Wajda, C., Nakamura, G., Leusink, G.

Journal:

ECS Transactions

Year:

2014

Language:

english

File:

PDF, 564 KB

english, 2014

32

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Nanomechanical Properties of High-K Dielectrics Grown by Atomic Layer Deposition

Tapily, Kanda, Jakes, Joseph, Stone, Donald, Shrestha, Pragya, Gu, Diefeng, Baumgart, Helmut, Elmustafa, Abdelmageed

Year:

2007

Language:

english

File:

PDF, 650 KB

english, 2007

33

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Effect of Wafer Bonding and Layer Splitting on Nanomechanical Properties of Standard and Strained SOI Films

Tapily, Kandabara, Baumgart, H., Gu, Diefeng, Elmustafa, Abdelmageed, Krause, Michael, Petzold, Matthias

Year:

2008

Language:

english

File:

PDF, 1.15 MB

english, 2008

34

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Synthesis of NbN Thin Films for Superconducting Radiofrequency (SRF) Applications by Atomic Layer Deposition to Fabricate Superconductor-Insulator-Superconductor (S-I-S) Multilayer Structures

Gu, Diefeng, Tapily, Kandabara, Baumgart, Helmut, Namkoong, Gon, Crooks, Roy

Year:

2010

Language:

english

File:

PDF, 1.13 MB

english, 2010

35

[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Experimental Study of ALD HfO2 Deposited on Strained Silicon-on-Insulator (sSOI & xsSOI) and SOI

Gu, Diefeng, Tapily, Kanda, Shrestha, Pragya, Celler, George, Baumgart, Helmut

Year:

2007

Language:

english

File:

PDF, 1.31 MB

english, 2007

36

Cyclic Plasma Treatment during ALD Hf1-xZrxO2 Deposition

Bhuyian, M. N., Misra, D., Tapily, K., Clark, R. D., Consiglio, S., Wajda, C. S., Nakamura, G., Leusink, G. J.

Journal:

ECS Journal of Solid State Science and Technology

Year:

2014

Language:

english

File:

PDF, 952 KB

english, 2014

37

[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Electrical Properties of High-k ALD HfO2 Deposited on Strained Si Layers Epitaxially Grown on Si0.8Ge0.2/Si Substrates

Shrestha, Pragya R., Gu, Diefeng, Tapily, Kandabara, Baumgart, H.

Year:

2008

Language:

english

File:

PDF, 584 KB

english, 2008

38

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Growth Mechanism of ALD ZnO Films Investigated by Physical Characterization

Tapily, Kandabara, Gu, Diefeng, Baumgart, Helmut

Year:

2010

Language:

english

File:

PDF, 588 KB

english, 2010

39

[ECS 216th ECS Meeting - Vienna, Austria (October 4 - October 9, 2009)] ECS Transactions - Physical Characterization of Zinc Oxide Thin Films Grown by ALD

Tapily, Kandabara, Stegall, David, Gu, Diefeng, Baumgart, Helmut, Namkoong, Gon, Elmustafa, Abdelmageed

Year:

2009

Language:

english

File:

PDF, 745 KB

english, 2009

40

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Electrical Characterization of ALD ZnO and HfO2 Thin Films

Tapily, Kandabara, Raj, A. Sneha, Gu, Diefeng, Baumgart, Helmut, Rozgonyi, George

Year:

2010

Language:

english

File:

PDF, 415 KB

english, 2010

41

Reliability of ALD Hf1-XZrxO2 Deposited by Intermediate Annealing or Intermediate Plasma Treatment

Bhuyian, M., Misra, D., Tapily, K., Clark, R., Consiglio, S., Wajda, C., Nakamura, G., Leusink, G.

Journal:

ECS Transactions

Year:

2013

Language:

english

File:

PDF, 741 KB

english, 2013

42

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Hydrogen Ion-Induced AlN Thin Layer Transfer: An Elastomechanical Study

Tapily, Kandabara, Moutanabbir, Oussama, Abdullah, Mamun, Gu, Diefeng, Baumgart, Helmut, Elmustafa, Abdelmageed

Year:

2010

Language:

english

File:

PDF, 493 KB

english, 2010

43

Nanoindentation Investigation of HfO[sub 2] and Al[sub 2]O[sub 3] Films Grown by Atomic Layer Deposition

Tapily, K., Jakes, J. E., Stone, D. S., Shrestha, P., Gu, D., Baumgart, H., Elmustafa, A. A.

Journal:

Journal of The Electrochemical Society

Year:

2008

Language:

english

File:

PDF, 1.37 MB

english, 2008

44

Impact of cyclic plasma treatment on oxygen vacancy defects in TiN/HfZrO/SiON/Si gate stacks

Bhuyian, Md Nasir Uddin, Poddar, S., Misra, D., Tapily, K., Clark, R. D., Consiglio, S., Wajda, C. S., Nakamura, G., Leusink, G. J.

Journal:

Applied Physics Letters

Year:

2015

Language:

english

File:

PDF, 957 KB

english, 2015

45

Comparison of B2O3 and BN deposited by atomic layer deposition for forming ultrashallow dopant regions by solid state diffusion

Consiglio, Steven, Clark, Robert D., O'Meara, David, Wajda, Cory S., Tapily, Kandabara, Leusink, Gert J.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2016

Language:

english

File:

PDF, 2.09 MB

english, 2016

46

Spatial Patterns of Plasmodium falciparum Clinical Incidence, Asymptomatic Parasite Carriage and Anopheles Density in Two Villages in Mali

Sissoko, M. S., van den Hoogen, L. L., Samake, Y., Tapily, A., Diarra, A. Z., Coulibaly, M., Bouare, M., Gaudart, J., Knight, P., Sauerwein, R. W., Takken, W., Bousema, T., Doumbo, O. K.

Journal:

American Journal of Tropical Medicine and Hygiene

Year:

2015

Language:

english

File:

PDF, 1.04 MB

english, 2015

47

Nanomechanical study of amorphous and polycrystalline ALD HfO2 thin films

Tapily, K., Jakes, J.E., Gu, D., Baumgart, H., Elmustafa, A.A.

Journal:

International Journal of Surface Science and Engineering

Year:

2011

Language:

english

File:

PDF, 912 KB

english, 2011

48

Analyzing Deoxyribose Nucleic Acid from Malaria Rapid Diagnostic Tests to Study Plasmodium falciparum Genetic Diversity in Mali

Nabet, C., Doumbo, S., Jeddi, F., Sagara, I., Manciulli, T., Tapily, A., L'Ollivier, C., Djimde, A., Doumbo, O. K., Piarroux, R.

Journal:

American Journal of Tropical Medicine and Hygiene

Year:

2016

Language:

english

File:

PDF, 3.95 MB

english, 2016

49

Electrical Characterization of Dry and Wet Processed Interface Layer in Ge/High-K Devices

Ding, Y. M., Misra, D., Bhuyian, M., Tapily, K., Clark, R. D., Consiglio, S., Wajda, C. S., Leusink, G. J.

Journal:

ECS Transactions

Year:

2015

Language:

english

File:

PDF, 6.04 MB

english, 2015

50

Higher-k Tetragonal Phase Stabilization in Atomic Layer Deposited Hf1-xZrxO2 (0

Dey, Sonal, Tapily, Kandabara, Consiglio, Steven, Yu, Kai-Hung, Clark, Robert D., Wajda, Cory S., Leusink, Gert J., Woll, Arthur R., Diebold, Alain C.

Journal:

Year:

2016

Language:

english

File:

PDF, 253 KB

english, 2016

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